Inventor
WONG STEPHEN CHEE KHUEN
SG3 patents
Patents
3 patentsUS7405466B2Jul 29, 2008
Method of fabricating microelectromechanical system structures
AGENCY SCIENCE TECH & RES4 citations57
US7153759B2Dec 26, 2006
Method of fabricating microelectromechanical system structures
AGENCY SCIENCE TECH & RES4 citations57
US7115182B2Oct 3, 2006
Anodic bonding process for ceramics
AGENCY SCIENCE TECH & RES4 citations55