Inventor
CHRISTODOULOU FANOS
US4 patents
Patents
4 patentsUS8658522B2Feb 25, 2014
Methods and apparatus for incorporating nitrogen in oxide films
APPLIED MATERIALS INC1 citations60
US7913645B2Mar 29, 2011
Methods and apparatus for incorporating nitrogen in oxide films
APPLIED MATERIALS INC2 citations60
US7902050B2Mar 8, 2011
Methods and apparatus for incorporating nitrogen in oxide films
APPLIED MATERIALS INC2 citations60
US8375892B2Feb 19, 2013
Methods and apparatus for incorporating nitrogen in oxide films
APPLIED MATERIALS INC0 citations50