Inventor
ZIELKE CHRISTIAN
DE6 patents
Patents
6 patentsUS10427937B2Oct 1, 2019
Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
BOSCH GMBH ROBERT0 citations46
US10020169B2Jul 10, 2018
Etching device and etching method
BOSCH GMBH ROBERT1 citations46
US9728760B2Aug 8, 2017
Battery system and spacer for creating a physical distance within the battery system
BOSCH GMBH ROBERT0 citations42
US9932223B2Apr 3, 2018
Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
BOSCH GMBH ROBERT0 citations36
US10658637B2May 19, 2020
Apparatus for increasing safety when using battery systems
BOSCH GMBH ROBERT0 citations33
US10181597B2Jan 15, 2019
Electrochemical energy store
BOSCH GMBH ROBERT0 citations33