Inventor
BREITSCHAEDEL OLIVER
DE3 patents
Patents
3 patentsUS10427937B2Oct 1, 2019
Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
BOSCH GMBH ROBERT0 citations46
US10020169B2Jul 10, 2018
Etching device and etching method
BOSCH GMBH ROBERT1 citations46
US9932223B2Apr 3, 2018
Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
BOSCH GMBH ROBERT0 citations36