Inventor
STAFFELD PETER BORWIN
DE4 patents
Patents
4 patentsUS10427937B2Oct 1, 2019
Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
BOSCH GMBH ROBERT0 citations46
US10020169B2Jul 10, 2018
Etching device and etching method
BOSCH GMBH ROBERT1 citations46
US11084714B2Aug 10, 2021
Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system
BOSCH GMBH ROBERT0 citations36
US9932223B2Apr 3, 2018
Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
BOSCH GMBH ROBERT0 citations36