Inventor

LIM Seng (victor) Keong

US2 patents

Patents

2 patents

US9646893B2May 9, 2017

Method and apparatus for reducing radiation induced change in semiconductor structures

APPLIED MATERIALS INC7 citations81

US9978620B2May 22, 2018

Method and apparatus for reducing radiation induced change in semiconductor structures

APPLIED MATERIALS INC0 citations49