Inventor

HAN MAN CHEOL

KR5 patents

⚠️ This page may combine multiple inventors who share the name “HAN MAN CHEOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PIEZONICS CO LTD

2 patents

US9476121B2Oct 25, 2016

Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof

PIEZONICS CO LTD21 citations89

US9469900B2Oct 18, 2016

Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof

PIEZONICS CO LTD4 citations69

BYUN CHULSOO

1 patent

US9315897B2Apr 19, 2016

Showerhead for film depositing vacuum equipment

BYUN CHULSOO492 citations95

BYUN CHUL SOO

1 patent

US8882913B2Nov 11, 2014

Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof

BYUN CHUL SOO48 citations94

KOREA INST IND TECH

1 patent

US10704145B2Jul 7, 2020

Reaction chamber for chemical vapor apparatus

KOREA INST IND TECH0 citations39