Inventor
FINN ANDREAS
DE3 patents
Patents
3 patentsUS10989913B2Apr 27, 2021
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations59
US10916536B2Feb 9, 2021
ESD protection device for a MEMS element
BOSCH GMBH ROBERT0 citations47
US10795149B2Oct 6, 2020
Micromirror device having a mechanical stop
BOSCH GMBH ROBERT0 citations34