Inventor
MATTINEN MIIKA
FI10 patents
Patents
10 patentsUS10319588B2Jun 11, 2019
Method for depositing a metal chalcogenide on a substrate by cyclical deposition
ASM IP HOLDING BV414 citations98
US10358407B2Jul 23, 2019
Synthesis and use of precursors for vapor deposition of tungsten containing thin films
ASM IP HOLDING BV13 citations92
US11014866B2May 25, 2021
Synthesis and use of precursors for vapor deposition of tungsten containing thin films
ASM IP HOLDING BV8 citations83
US12209305B2Jan 28, 2025
Deposition of transition metal—comprising material
ASM IP HOLDING BV2 citations74
US11667595B2Jun 6, 2023
Synthesis and use of precursors for vapor deposition of tungsten containing thin films
ASM IP HOLDING BV2 citations72
US11244825B2Feb 8, 2022
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
ASM IP HOLDING BV5 citations72
US12565466B2Mar 3, 2026
Synthesis and use of precursors for vapor deposition of tungsten containing thin films
ASM IP HOLDING BV0 citations62
US10847366B2Nov 24, 2020
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
ASM IP HOLDING BV1 citations62
US12532674B2Jan 20, 2026
Methods and apparatus for depositing a chalcogenide film and structures including the film
ASM IP HOLDING BV0 citations51
US10734223B2Aug 4, 2020
Method for depositing a metal chalcogenide on a substrate by cyclical deposition
ASM IP HOLDING BV0 citations51