Inventor
ITO TOKUHISA
JP3 patents
Patents
3 patentsUS4650335AMar 17, 1987
Comparison type dimension measuring method and apparatus using a laser beam in a microscope system
ASAHI OPTICAL CO LTD49 citations88
US4625103ANov 25, 1986
Automatic focusing device in microscope system
ASAHI OPTICAL CO LTD22 citations78
US4512642AApr 23, 1985
Automatic focusing apparatus in optical drawing machine
ASAHI OPTICAL CO LTD19 citations69