Inventor
YEN CHU-TSAO
US6 patents
Patents
6 patentsUS6025260AFeb 15, 2000
Method for fabricating air gap with borderless contact
INTEGRATED DEVICE TECH51 citations95
US5981356ANov 9, 1999
Isolation trenches with protected corners
INTEGRATED DEVICE TECH76 citations94
US6136687AOct 24, 2000
Method of forming air gaps for reducing interconnect capacitance
INTEGRATED DEVICE TECH51 citations90
US5911108AJun 8, 1999
Method for protecting an alignment mark on a semiconductor substrate during chemical mechanical polishing and the resulting structure
INTEGRATED DEVICE TECH22 citations90
US6232647B1May 15, 2001
Air gap with borderless contact
INTEGRATED DEVICE TECH13 citations73
US5789314AAug 4, 1998
Method of topside and inter-metal oxide coating
INTEGRATED DEVICE TECH12 citations72