Inventor

MARTINSON ROBERT M

US4 patents

⚠️ This page may combine multiple inventors who share the name “MARTINSON ROBERT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG HAMATECH AG

2 patents

US6406598B2Jun 18, 2002

System and method for transporting and sputter coating a substrate in a sputter deposition system

STEAG HAMATECH AG6 citations71

US6413381B1Jul 2, 2002

Horizontal sputtering system

STEAG HAMATECH AG3 citations60

NOVELLUS SYSTEMS INC

1 patent

US6500321B1Dec 31, 2002

Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target

NOVELLUS SYSTEMS INC47 citations91

SKE TECHNOLOGY CORP

1 patent

US6264804B1Jul 24, 2001

System and method for handling and masking a substrate in a sputter deposition system

SKE TECHNOLOGY CORP19 citations86