Inventor
CHANG FA-YUAN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHANG FA-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6069091AMay 30, 2000
In-situ sequential silicon containing hard mask layer/silicon layer plasma etch method
TAIWAN SEMICONDUCTOR MFG65 citations92
US6679064B2Jan 20, 2004
Wafer transfer system with temperature control apparatus
TAIWAN SEMICONDUCTOR MFG7 citations69
US7696766B2Apr 13, 2010
Ultra-fine pitch probe card structure
TAIWAN SEMICONDUCTOR MFG2 citations61
US7732299B2Jun 8, 2010
Process for wafer bonding
TAIWAN SEMICONDUCTOR MFG6 citations58