Inventor
COWLEY ANDY
US14 patents
⚠️ This page may combine multiple inventors who share the name “COWLEY ANDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
8 patentsUS7060619B2Jun 13, 2006
Reduction of the shear stress in copper via's in organic interlayer dielectric material
INFINEON TECHNOLOGIES AG39 citations92
US6806579B2Oct 19, 2004
Robust via structure and method
INFINEON TECHNOLOGIES AG29 citations92
US6872648B2Mar 29, 2005
Reduced splattering of unpassivated laser fuses
INFINEON TECHNOLOGIES AG26 citations91
US6864171B1Mar 8, 2005
Via density rules
INFINEON TECHNOLOGIES AG13 citations80
US6758223B1Jul 6, 2004
Plasma RIE polymer removal
INFINEON TECHNOLOGIES AG12 citations69
US7041574B2May 9, 2006
Composite intermetal dielectric structure including low-k dielectric material
INFINEON TECHNOLOGIES AG5 citations62
US7368804B2May 6, 2008
Method and apparatus of stress relief in semiconductor structures
INFINEON TECHNOLOGIES AG2 citations60
US7786007B2Aug 31, 2010
Method and apparatus of stress relief in semiconductor structures
INFINEON TECHNOLOGIES AG0 citations50
IBM
4 patentsUS7052621B2May 30, 2006
Bilayered metal hardmasks for use in Dual Damascene etch schemes
IBM15 citations92
US7241681B2Jul 10, 2007
Bilayered metal hardmasks for use in dual damascene etch schemes
IBM13 citations83
US7091612B2Aug 15, 2006
Dual damascene structure and method
IBM8 citations73
US7125792B2Oct 24, 2006
Dual damascene structure and method
IBM8 citations72