Inventor
LOPATIN OLEKSIY
CA2 patents
Patents
2 patentsUS7180084B2Feb 20, 2007
Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
PHOTON DYNAMICS INC27 citations90
US7041998B2May 9, 2006
Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
PHOTON DYNAMICS INC10 citations71