Inventor

SAWUSCH STEFAN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “SAWUSCH STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7732340B2Jun 8, 2010

Method for adjusting a critical dimension in a high aspect ratio feature

TOKYO ELECTRON LTD5 citations58

SAWUSCH STEFAN

1 patent

US8464741B2Jun 18, 2013

Flow control method for multizone gas distribution

SAWUSCH STEFAN0 citations22