Inventor
LEE SANG KEE
KR12 patents
⚠️ This page may combine multiple inventors who share the name “LEE SANG KEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
8 patentsUS11011405B2May 18, 2021
Apparatus for supporting substrate having gas supply hole and method of manufacturing same
SEMES CO LTD4 citations71
US11367646B2Jun 21, 2022
Electrostatic chuck and electrostatic chuck apparatus including the same
SEMES CO LTD0 citations61
US11705357B2Jul 18, 2023
Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck
SEMES CO LTD0 citations59
US12438028B2Oct 7, 2025
Substrate support unit, method of manufacturing the same, and substrate processing apparatus including the same
SEMES CO LTD0 citations51
US11056367B2Jul 6, 2021
Buffer unit, and apparatus for treating substrate with the unit
SEMES CO LTD0 citations48
US11244847B2Feb 8, 2022
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations47
US12354852B2Jul 8, 2025
Electrostatic chuck, substrate processing apparatus, and substrate processing method
SEMES CO LTD0 citations46
US11056320B2Jul 6, 2021
Substrate treating apparatus, substrate support unit, and substrate treating method
SEMES CO LTD0 citations46
SK HYNIX INC
4 patentsUS8853032B2Oct 7, 2014
Semiconductor device and method for manufacturing the same
SK HYNIX INC1 citations61
US9704989B2Jul 11, 2017
Semiconductor device and method for manufacturing the same
SK HYNIX INC0 citations51
US9406766B2Aug 2, 2016
Semiconductor device and method for manufacturing the same
SK HYNIX INC0 citations51
US9252216B2Feb 2, 2016
Semiconductor device and method for manufacturing the same
SK HYNIX INC0 citations51