Inventor
SMITH DAVID CHARLES
US28 patents
⚠️ This page may combine multiple inventors who share the name “SMITH DAVID CHARLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
26 patentsUS9911595B1Mar 6, 2018
Selective growth of silicon nitride
LAM RES CORP388 citations99
US9824893B1Nov 21, 2017
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP442 citations98
US11031245B2Jun 8, 2021
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP21 citations94
US10043656B1Aug 7, 2018
Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
LAM RES CORP24 citations94
US11183383B2Nov 23, 2021
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP16 citations93
US11784047B2Oct 10, 2023
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP10 citations86
US10199212B2Feb 5, 2019
Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
LAM RES CORP14 citations86
US10629429B2Apr 21, 2020
Selective deposition of silicon oxide
LAM RES CORP6 citations84
US10490413B2Nov 26, 2019
Selective growth of silicon nitride
LAM RES CORP6 citations84
US10242866B2Mar 26, 2019
Selective deposition of silicon nitride on silicon oxide using catalytic control
LAM RES CORP9 citations84
US10176984B2Jan 8, 2019
Selective deposition of silicon oxide
LAM RES CORP11 citations84
US10763108B2Sep 1, 2020
Geometrically selective deposition of a dielectric film
LAM RES CORP9 citations83
US10643846B2May 5, 2020
Selective growth of metal-containing hardmask thin films
LAM RES CORP5 citations83
US10559461B2Feb 11, 2020
Selective deposition with atomic layer etch reset
LAM RES CORP10 citations83
US12051589B2Jul 30, 2024
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP6 citations75
US10903071B2Jan 26, 2021
Selective deposition of silicon oxide
LAM RES CORP1 citations73
US10777407B2Sep 15, 2020
Selective deposition of silicon nitride on silicon oxide using catalytic control
LAM RES CORP3 citations73
US10128116B2Nov 13, 2018
Integrated direct dielectric and metal deposition
LAM RES CORP2 citations73
US11107683B2Aug 31, 2021
Selective growth of metal-containing hardmask thin films
LAM RES CORP2 citations72
US10998187B2May 4, 2021
Selective deposition with atomic layer etch reset
LAM RES CORP2 citations72
US10662526B2May 26, 2020
Method for selective deposition using a base-catalyzed inhibitor
LAM RES CORP4 citations71
US10643889B2May 5, 2020
Pre-treatment method to improve selectivity in a selective deposition process
LAM RES CORP2 citations71
US9624578B2Apr 18, 2017
Method for RF compensation in plasma assisted atomic layer deposition
LAM RES CORP2 citations71
US12371781B2Jul 29, 2025
In situ protective coating of chamber components for semiconductor processing
LAM RES CORP0 citations52
US10526700B2Jan 7, 2020
Hardware and process for film uniformity improvement
LAM RES CORP0 citations52
US10100407B2Oct 16, 2018
Hardware and process for film uniformity improvement
LAM RES CORP1 citations52