Inventor
SWENBERG JOHANES S
US14 patents
⚠️ This page may combine multiple inventors who share the name “SWENBERG JOHANES S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS9023700B2May 5, 2015
Method and apparatus for single step selective nitridation
APPLIED MATERIALS INC5 citations83
US10347492B2Jul 9, 2019
Modifying work function of a metal film with a plasma process
APPLIED MATERIALS INC6 citations72
US10103027B2Oct 16, 2018
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film
APPLIED MATERIALS INC3 citations72
US11081340B2Aug 3, 2021
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC0 citations61
US10971357B2Apr 6, 2021
Thin film treatment process
APPLIED MATERIALS INC0 citations61
US10636650B2Apr 28, 2020
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC1 citations61
US10580643B2Mar 3, 2020
Fluorination during ALD high-k, fluorination post high-k and use of a post fluorination anneal to engineer fluorine bonding and incorporation
APPLIED MATERIALS INC0 citations52
US10510545B2Dec 17, 2019
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film
APPLIED MATERIALS INC0 citations51
US10504779B2Dec 10, 2019
Hydrogenation and nitridization processes for reducing oxygen content in a film
APPLIED MATERIALS INC0 citations51
US10431466B2Oct 1, 2019
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film
APPLIED MATERIALS INC0 citations51
US10236207B2Mar 19, 2019
Hydrogenation and nitridization processes for reducing oxygen content in a film
APPLIED MATERIALS INC0 citations51
US8846509B2Sep 30, 2014
Remote radical hydride dopant incorporation for delta doping in silicon
APPLIED MATERIALS INC0 citations51