Inventor
YANAGIDA TATSUYA
JP40 patents
⚠️ This page may combine multiple inventors who share the name “YANAGIDA TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
26 patentsUS10932350B2Feb 23, 2021
Extreme ultraviolet light generation system
GIGAPHOTON INC4 citations84
US9509115B2Nov 29, 2016
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC5 citations84
US9167678B2Oct 20, 2015
System and method for generating extreme ultraviolet light
GIGAPHOTON INC8 citations84
US9130345B2Sep 8, 2015
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC10 citations84
US8710475B2Apr 29, 2014
Extreme ultraviolet light source device and method for generating extreme ultraviolet light
GIGAPHOTON INC7 citations84
US10630042B2Apr 21, 2020
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC2 citations73
US10306743B1May 28, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC1 citations73
US10172225B2Jan 1, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC5 citations73
US10074956B2Sep 11, 2018
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC3 citations73
US9986629B2May 29, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC5 citations73
US9402297B2Jul 26, 2016
Extreme ultraviolet light generation system
GIGAPHOTON INC3 citations73
US8742380B2Jun 3, 2014
Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
GIGAPHOTON INC5 citations73
US11477877B2Oct 18, 2022
Laser apparatus for generating extreme ultraviolet light
GIGAPHOTON INC2 citations72
US8841641B2Sep 23, 2014
Extreme ultraviolet light source apparatus
GIGAPHOTON INC2 citations63
US10667375B2May 26, 2020
Extreme ultraviolet light generation method
GIGAPHOTON INC1 citations62
US11226565B2Jan 18, 2022
Extreme ultraviolet light generating system and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US10582601B2Mar 3, 2020
Extreme ultraviolet light generating apparatus using differing laser beam diameters
GIGAPHOTON INC0 citations52
US10555408B2Feb 4, 2020
Extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US10251255B2Apr 2, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10117317B2Oct 30, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9980360B2May 22, 2018
Extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US9877378B2Jan 23, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9497841B2Nov 15, 2016
Extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US9497842B2Nov 15, 2016
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10512148B2Dec 17, 2019
System and method for generating extreme ultraviolet light employing laser pulse including pedestal
GIGAPHOTON INC0 citations51
US10627287B2Apr 21, 2020
Thomson scattering measurement system and EUV light generation system
GIGAPHOTON INC0 citations35
YANAGIDA TATSUYA
4 patentsUS8669543B2Mar 11, 2014
System and method for generating extreme ultraviolet light, and laser apparatus
YANAGIDA TATSUYA20 citations92
US8558202B2Oct 15, 2013
Extreme ultraviolet light source apparatus
YANAGIDA TATSUYA14 citations83
US8436328B2May 7, 2013
Extreme ultraviolet light source apparatus
YANAGIDA TATSUYA14 citations83
US8853656B2Oct 7, 2014
Extreme ultraviolet light source device
YANAGIDA TATSUYA0 citations41
UENO YOSHIFUMI
2 patentsHORI TSUKASA
2 patentsWAKABAYASHI OSAMU
2 patentsUS9072153B2Jun 30, 2015
Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target
WAKABAYASHI OSAMU16 citations83
US9072152B2Jun 30, 2015
Extreme ultraviolet light generation system utilizing a variation value formula for the intensity
WAKABAYASHI OSAMU4 citations73