Inventor
WAKABAYASHI OSAMU
JP299 patents
⚠️ This page may combine multiple inventors who share the name “WAKABAYASHI OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU MFG CO LTD
28 patentsUS5642374AJun 24, 1997
Excimer laser device
KOMATSU MFG CO LTD111 citations98
US5142543AAug 25, 1992
Method and system for controlling narrow-band oscillation excimer laser
KOMATSU MFG CO LTD130 citations98
US5802094ASep 1, 1998
Narrow band excimer laser
KOMATSU MFG CO LTD61 citations96
US5748316AMay 5, 1998
Detector for wavelength of excimer laser
KOMATSU MFG CO LTD67 citations96
US5596596AJan 21, 1997
Narrow band excimer laser
KOMATSU MFG CO LTD71 citations96
US5404366AApr 4, 1995
Narrow band excimer laser and wavelength detecting apparatus
KOMATSU MFG CO LTD94 citations96
US5373523ADec 13, 1994
Excimer laser apparatus
KOMATSU MFG CO LTD58 citations96
US5081635AJan 14, 1992
Apparatus for controlling output from an excimer laser device
KOMATSU MFG CO LTD82 citations96
US4975919ADec 4, 1990
Laser wavelength control apparatus
KOMATSU MFG CO LTD90 citations96
US6721344B2Apr 13, 2004
Injection locking type or MOPA type of laser device
KOMATSU MFG CO LTD67 citations95
US5710787AJan 20, 1998
Output controller for laser device
KOMATSU MFG CO LTD62 citations95
US5463650AOct 31, 1995
Apparatus for controlling output of an excimer laser device
KOMATSU MFG CO LTD86 citations95
US5373515ADec 13, 1994
Laser wavelength controlling apparatus
KOMATSU MFG CO LTD114 citations94
US4926428AMay 15, 1990
Method and apparatus for sensing the wavelength of a laser beam
KOMATSU MFG CO LTD55 citations94
US4856018AAug 8, 1989
Light source for reduced projection
KOMATSU MFG CO LTD68 citations94
US4829536AMay 9, 1989
Multi-mode narrow-band oscillation excimer laser
KOMATSU MFG CO LTD83 citations94
US7915600B2Mar 29, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD22 citations92
US6879617B2Apr 12, 2005
Two stage laser system
KOMATSU MFG CO LTD21 citations92
US6810061B2Oct 26, 2004
Discharge electrode and discharge electrode manufacturing method
KOMATSU MFG CO LTD32 citations92
US6526086B1Feb 25, 2003
Band narrowing laser
KOMATSU MFG CO LTD47 citations92
US6151350ANov 21, 2000
Gas laser
KOMATSU MFG CO LTD41 citations92
US6101211AAug 8, 2000
Narrow-band laser apparatus
KOMATSU MFG CO LTD31 citations92
US6008497ADec 28, 1999
Laser appartus
KOMATSU MFG CO LTD35 citations92
US5218421AJun 8, 1993
Wavelength detecting apparatus
KOMATSU MFG CO LTD24 citations92
US5198872AMar 30, 1993
Apparatus for detecting the wavelength of laser light
KOMATSU MFG CO LTD29 citations92
US6496527B1Dec 17, 2002
Ultraviolet laser apparatus and gas for ultraviolet laser
KOMATSU MFG CO LTD24 citations90
US6084897AJul 4, 2000
Laser processing device and laser device
KOMATSU MFG CO LTD45 citations90
US6317203B1Nov 13, 2001
Narrowband module inspection device
KOMATSU MFG CO LTD20 citations86
GIGAPHOTON INC
8 patentsUS9131589B2Sep 8, 2015
Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system
GIGAPHOTON INC23 citations93
US7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US10932350B2Feb 23, 2021
Extreme ultraviolet light generation system
GIGAPHOTON INC4 citations84
US9711934B2Jul 18, 2017
Laser apparatus
GIGAPHOTON INC7 citations84
US9509115B2Nov 29, 2016
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC5 citations84
US9167678B2Oct 20, 2015
System and method for generating extreme ultraviolet light
GIGAPHOTON INC8 citations84
US9130345B2Sep 8, 2015
System and method for generating extreme ultraviolet light, and laser apparatus
GIGAPHOTON INC10 citations84
US8957356B2Feb 17, 2015
System and method for generating extreme ultraviolet light
GIGAPHOTON INC8 citations84
MORIYA MASATO
6 patentsUS8242472B2Aug 14, 2012
Extreme ultraviolet light source device and control method for extreme ultraviolet light source device
MORIYA MASATO37 citations93
US8395133B2Mar 12, 2013
Apparatus and method of adjusting a laser light source for an EUV source device
MORIYA MASATO21 citations92
US8536551B2Sep 17, 2013
Extreme ultra violet light source apparatus
MORIYA MASATO10 citations84
US8399870B2Mar 19, 2013
Extreme ultraviolet light source device and control method for extreme ultraviolet light source device
MORIYA MASATO8 citations84
US8198613B2Jun 12, 2012
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
MORIYA MASATO12 citations84
US8173984B2May 8, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO8 citations84
USHIO ELECTRIC INC
2 patentsENDO AKIRA
2 patentsYANAGIDA TATSUYA
1 patentHORI TSUKASA
1 patentMITSUBISHI CHEM IND
1 patentNAGAI SHINJI
1 patentShowing the top 50 of 299 patents by PatentIndex Score.