Inventor

GLEASON ROBERT T

US2 patents

Patents

2 patents

US4430153AFeb 7, 1984

Method of forming an RIE etch barrier by in situ conversion of a silicon containing alkyl polyamide/polyimide

IBM62 citations92

US5153307AOct 6, 1992

Stabilization of polyamide alkyl ester solutions

IBM8 citations70