Inventor
LI HAOJIANG
US4 patents
Patents
4 patentsUS6009830AJan 4, 2000
Independent gas feeds in a plasma reactor
APPLIED MATERIALS INC135 citations96
US6579730B2Jun 17, 2003
Monitoring process for oxide removal
APPLIED MATERIALS INC27 citations91
US6184150B1Feb 6, 2001
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography
APPLIED MATERIALS INC14 citations71
US6936842B2Aug 30, 2005
Method and apparatus for process monitoring
APPLIED MATERIALS INC4 citations61