Inventor

ASKARY FARID

US4 patents

⚠️ This page may combine multiple inventors who share the name “ASKARY FARID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US5869833AFeb 9, 1999

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

KLA TENCOR CORP78 citations95

US6211518B1Apr 3, 2001

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

KLA TENCOR CORP25 citations92

(unassigned)

1 patent

US6873747B2Mar 29, 2005

Method for measurement of pitch in metrology and imaging systems

43 citations88

PLASER CORP

1 patent

US4774416ASep 27, 1988

Large cross-sectional area molecular beam source for semiconductor processing

PLASER CORP33 citations84