Inventor
KUHLMAN MICHAEL J
US5 patents
⚠️ This page may combine multiple inventors who share the name “KUHLMAN MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
3 patentsUS6315512B1Nov 13, 2001
Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber
MATTSON TECH INC737 citations97
US6647665B1Nov 18, 2003
Door systems for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC58 citations94
US6568552B1May 27, 2003
Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC45 citations94