Inventor
YANAGI YOSHITAKA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YANAGI YOSHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
4 patentsUS6818148B1Nov 16, 2004
Resist composition and patterning method
SHINETSU CHEMICAL CO10 citations73
US6395453B1May 28, 2002
Photoresist compositions and patterning method
SHINETSU CHEMICAL CO6 citations72
US7109311B2Sep 19, 2006
Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
SHINETSU CHEMICAL CO6 citations62
US7101651B2Sep 5, 2006
Sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
SHINETSU CHEMICAL CO0 citations51