Inventor

KUO JUI-CHUN

TW2 patents

Patents

2 patents

US6545245B2Apr 8, 2003

Method for dry cleaning metal etching chamber

UNITED MICROELECTRONICS CORP3 citations57

US7386420B2Jun 10, 2008

Data analysis method for integrated circuit process and semiconductor process

UNITED MICROELECTRONICS CORP5 citations53