Inventor
PAUL GOUTAM
US3 patents
Patents
3 patentsUS6834549B2Dec 28, 2004
Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array
INTEL CORP8 citations69
US7559242B2Jul 14, 2009
Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA)
INTEL CORP6 citations61
US7515045B2Apr 7, 2009
Wireless micro-electromechanical (MEMS) apparatus and method for real time characterization of motion parameters
INTEL CORP0 citations27