Inventor

CHIEN YING-HSUEH CHANG

TW7 patents

⚠️ This page may combine multiple inventors who share the name “CHIEN YING-HSUEH CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YEH MING-HSI

2 patents

US8657963B2Feb 25, 2014

In-situ backside cleaning of semiconductor substrate

YEH MING-HSI8 citations83

US9299593B2Mar 29, 2016

Semiconductor device cleaning method and apparatus

YEH MING-HSI0 citations40

TAIWAN SEMICONDUCTOR MFG

2 patents

US8871639B2Oct 28, 2014

Semiconductor devices and methods of manufacture thereof

TAIWAN SEMICONDUCTOR MFG9 citations82

US9349623B2May 24, 2016

Fine temperature controllable wafer heating system

TAIWAN SEMICONDUCTOR MFG0 citations50

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US10020209B2Jul 10, 2018

Fine temperature controllable wafer heating system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50

US10512946B2Dec 24, 2019

Gigasonic cleaning techniques

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40

CHIEN YING-HSUEH CHANG

1 patent

US8926762B2Jan 6, 2015

Apparatus and methods for movable megasonic wafer probe

CHIEN YING-HSUEH CHANG5 citations78