Inventor

SHIRAHATA KAORI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SHIRAHATA KAORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US9520266B2Dec 13, 2016

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

HITACHI HIGH TECH CORP4 citations72

US10014160B2Jul 3, 2018

Scanning electron microscope and method for controlling same

HITACHI HIGH TECH CORP0 citations40

HITACHI LTD

1 patent

US10361063B2Jul 23, 2019

Charged particle detector and charged particle beam device using the same

HITACHI LTD0 citations50

SOHDA YASUNARI

1 patent

US8637820B2Jan 28, 2014

Scanning electron microscope and inspection method using same

SOHDA YASUNARI1 citations48

SHIRAHATA KAORI

1 patent

US8478021B2Jul 2, 2013

Charged beam device

SHIRAHATA KAORI0 citations33