Inventor
HAACKER FABIAN
DE4 patents
Patents
4 patentsUS9874819B2Jan 23, 2018
Mirror array
ZEISS CARL SMT GMBH4 citations70
US9851555B2Dec 26, 2017
Optical component
ZEISS CARL SMT GMBH3 citations68
US10101507B2Oct 16, 2018
Mirror device
ZEISS CARL SMT GMBH1 citations46
US10409167B2Sep 10, 2019
Method for illuminating an object field of a projection exposure system
ZEISS CARL SMT GMBH0 citations39