Inventor
PAHK JAEBUM
KR5 patents
Patents
5 patentsUS11565351B2Jan 31, 2023
Substrate processing apparatus and substrate processing method
SAMSUNG DISPLAY CO LTD2 citations64
US11351632B2Jun 7, 2022
Particle removal apparatus and laser cutting apparatus including the same
SAMSUNG DISPLAY CO LTD0 citations45
US10431461B2Oct 1, 2019
Deposition apparatus
SAMSUNG DISPLAY CO LTD0 citations45
US9960041B2May 1, 2018
Deposition apparatus
SAMSUNG DISPLAY CO LTD0 citations45
US12501778B2Dec 16, 2025
Display device and method of manufacturing the same
SAMSUNG DISPLAY CO LTD0 citations35