Inventor
PONNUSWAMY THOMAS
US10 patents
⚠️ This page may combine multiple inventors who share the name “PONNUSWAMY THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
6 patentsUS7964506B1Jun 21, 2011
Two step copper electroplating process with anneal for uniform across wafer deposition and void free filling on ruthenium coated wafers
NOVELLUS SYSTEMS INC60 citations95
US9523155B2Dec 20, 2016
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
NOVELLUS SYSTEMS INC15 citations92
US9834852B2Dec 5, 2017
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
NOVELLUS SYSTEMS INC13 citations83
US10662545B2May 26, 2020
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
NOVELLUS SYSTEMS INC4 citations72
US10092933B2Oct 9, 2018
Methods and apparatuses for cleaning electroplating substrate holders
NOVELLUS SYSTEMS INC6 citations72
US9412713B2Aug 9, 2016
Treatment method of electrodeposited copper for wafer-level-packaging process flow
NOVELLUS SYSTEMS INC0 citations52