Inventor

DIAZ CAMILO HILTON

US3 patents

Patents

3 patents

US9523155B2Dec 20, 2016

Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating

NOVELLUS SYSTEMS INC15 citations92

US9834852B2Dec 5, 2017

Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating

NOVELLUS SYSTEMS INC13 citations83

US10662545B2May 26, 2020

Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating

NOVELLUS SYSTEMS INC4 citations72