P

Inventor

DASTOURI ZAHRASADAT

US4 patents
⚠️ This page may combine multiple inventors who share the name “DASTOURI ZAHRASADAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

3 patents
US12474647B2Nov 18, 2025

Generating an alignment signal based on local alignment mark distortions

ASML HOLDING NV0 citations59
US11513446B2Nov 29, 2022

Adaptive alignment

ASML HOLDING NV0 citations44
US11493852B2Nov 8, 2022

Noise correction for alignment signal

ASML HOLDING NV0 citations44

ASML NETHERLANDS BV

1 patent
US12461457B2Nov 4, 2025

Asymmetry extended grid model for wafer alignment

ASML NETHERLANDS BV0 citations44