Inventor
LIAO WEI-FAN
TW6 patents
Patents
6 patentsUS10269569B2Apr 23, 2019
Semiconductor device and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations81
US10504734B2Dec 10, 2019
Semiconductor device and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12272556B2Apr 8, 2025
Method of manufacturing a semiconductor device with a work-function layer having a concentration of fluorine
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11380549B2Jul 5, 2022
Semiconductor device with a work function layer having a concentration of fluorine
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10727066B2Jul 28, 2020
Semiconductor device and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9048268B2Jun 2, 2015
Method and equipment for removing photoresist residue after dry etch
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations44