Inventor
IZUMI SHIGETO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “IZUMI SHIGETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CO LTD
5 patentsUS6273803B1Aug 14, 2001
Carriers and polishing apparatus
SPEEDFAM CO LTD57 citations95
US5916009AJun 29, 1999
Apparatus for applying an urging force to a wafer
SPEEDFAM CO LTD70 citations95
US6012964AJan 11, 2000
Carrier and CMP apparatus
SPEEDFAM CO LTD73 citations93
US6030488AFeb 29, 2000
Chemical and mechanical polishing apparatus
SPEEDFAM CO LTD38 citations92
US6062954AMay 16, 2000
Semiconductor wafer surface flattening apparatus
SPEEDFAM CO LTD44 citations91
NIKON CORP
4 patentsUS7175504B2Feb 13, 2007
Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus
NIKON CORP7 citations73
US9498944B2Nov 22, 2016
Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrate
NIKON CORP3 citations72
US7175508B2Feb 13, 2007
Polishing apparatus, method of manufacturing semiconductor device using the same, and semiconductor device manufactured by this method
NIKON CORP3 citations61
US9978616B2May 22, 2018
Pressing apparatus, substrate bonding apparatus and stacked substrate
NIKON CORP1 citations51