Inventor

CHANG SHIH-MING

TW174 patents

⚠️ This page may combine multiple inventors who share the name “CHANG SHIH-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG SHIH-MING

TAIWAN SEMICONDUCTOR MFG CO LTD

Layout optimization of a main pattern and a cut pattern

Via-free interconnect structure with self-aligned metal line interconnections

Systems and methods for improving pattern transfer

Optical proximity correction and photomasks

Buried metal track and methods forming same

Integrated circuit and method of manufacturing same

Method for forming semiconductor device structure

Lithography system with an embedded cleaning module

Buried metal track and methods forming same

Mechanisms for forming patterns using multiple lithography processes

Via connection to a partially filled trench

Methods for integrated circuit design and fabrication

Method for integrated circuit manufacturing

Geometric mask rule check with favorable and unfavorable zones

Mechanisms for forming patterns using multiple lithography processes

Via connection to a partially filled trench

System and method for real-time overlay error reduction

Methods for integrated circuit design and fabrication

Mechanisms for forming patterns using multiple lithography processes

Layout hierachical structure defined in polar coordinate

Homogeneous thermal equalization with active device

Mechanisms for forming patterns using multiple lithography processes

Interconnection structure and methods of fabrication the same

Mechanisms for forming patterns using multiple lithography processes

Systems and methods for a sequential spacer scheme

Method of patterning a film layer

Self aligned patterning with multiple resist layers

Homogeneous thermal equalization with active device

System and method for integrated circuit manufacturing

TAIWAN SEMICONDUCTOR MFG

Spacer etching process for integrated circuit design

Pattern modification with a preferred position function

Photolithography mask and process

Self-alignment for using two or more layers and methods of forming same

Method for integrated circuit patterning

System and method for examining mask pattern fidelity

Systems and methods for a sequential spacer scheme

Mechanisms for forming patterns using multiple lithography processes

Mechanisms for forming patterns using multiple lithography processes

Photo resist trimmed line end space

Apparatus and method for controlling relative particle speeds in a plasma

System and method for optimization of an imaged pattern of a semiconductor device

Apparatus and method for regional plasma control

CHANG SHIH-MING

Carabiner multi-tool

Holographic reticle and patterning method

Semiconductor device with self-aligned interconnects and blocking portions

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Pattern recognition system

CIXI HAOSHENG ELECTRONICS & HARDWARE CO LTD

Inverse animal feeder

TANG YU-PO

Via-free interconnect structure with self-aligned metal line interconnections

CIXI HAOSHENG ELECTRONICS & HA

Spreading device for feedstuff

VANGUARD INT SEMICONDUCT CORP

Method for producing multi-level contacts