P
PatentIndex
Search
Landscape
Sign in
Inventor
YANG LI-JIA
TW
2 patents
Patents
2 patents
US7109117B2
Sep 19, 2006
Method for chemical mechanical polishing of a shallow trench isolation structure
TAIWAN SEMICONDUCTOR MFG
2 citations
59
US7016790B2
Mar 21, 2006
In-line hot-wire sensor for slurry monitoring
TAIWAN SEMICONDUCTOR MFG
1 citations
45