Inventor
CHHATRE AMBARISH
US6 patents
⚠️ This page may combine multiple inventors who share the name “CHHATRE AMBARISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS10804081B2Oct 13, 2020
Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber
LAM RES CORP7 citations82
US11781650B2Oct 10, 2023
Edge seal for lower electrode assembly
LAM RES CORP1 citations70
US12368025B2Jul 22, 2025
Edge seal for lower electrode assembly
LAM RES CORP0 citations60