Inventor
TOPPING STEPHEN
US3 patents
Patents
3 patentsUS11086233B2Aug 10, 2021
Protective coating for electrostatic chucks
LAM RES CORP10 citations81
US12217985B2Feb 4, 2025
Wafer placement correction in indexed multi-station processing chambers
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US11835868B2Dec 5, 2023
Protective coating for electrostatic chucks
LAM RES CORP3 citations68