Inventor · disambiguated record
Guenther O. Langner
Also filed as: LANGNER GUENTHER · LANGNER GUENTHER O
14 granted patents·424 citations·filing 1980–1996
94Inventor score
Top patents by PatentIndex Score
14 records- 0194US4376249AVariable axis electron beam projection systemIBM·Filed 1980·Granted Mar 8, 1983·54 cites·14 claims
- 0292US4820927AElectron beam source employing a photo-emitter cathodeCONTROL DATA CORP·Filed 1987·Granted Apr 11, 1989·57 cites·11 claims
- 0390US4415851ASystem for contactless testing of multi-layer ceramicsIBM·Filed 1981·Granted Nov 15, 1983·55 cites·17 claims
- 0484US4468565AAutomatic focus and deflection correction in E-beam system using optical target height measurementsIBM·Filed 1981·Granted Aug 28, 1984·29 cites·11 claims
- 0583US5301124ARegistration of patterns formed of multiple fieldsIBM·Filed 1993·Granted Apr 5, 1994·46 cites·9 claims
- 0672US5708274ACurvilinear variable axis lens correction with crossed coilsIBM·Filed 1996·Granted Jan 13, 1998·25 cites·11 claims
- 0771US5481164AVariable axis stigmatorIBM·Filed 1994·Granted Jan 2, 1996·19 cites·14 claims
- 0870US4683366AAll electrostatic electron optical sub-system for variable electron beam spot shaping and method of operationCONTROL DATA CORP·Filed 1985·Granted Jul 28, 1987·17 cites·14 claims
- 0969US5136167AElectron beam lens and deflection system for plural-level telecentric deflectionIBM·Filed 1991·Granted Aug 4, 1992·21 cites·30 claims
- 1066US5389858AVariable axis stigmatorIBM·Filed 1992·Granted Feb 14, 1995·16 cites·10 claims
- 1164US4675528AMethod for measurement of spotsize and edgewidth in electron beam lithographyCONTROL DATA CORP·Filed 1985·Granted Jun 23, 1987·24 cites·28 claims
- 1262US5793048ACurvilinear variable axis lens correction with shifted dipolesIBM·Filed 1996·Granted Aug 11, 1998·24 cites·7 claims
- 1360US5757010ACurvilinear variable axis lens correction with centered dipolesIBM·Filed 1996·Granted May 26, 1998·23 cites·8 claims
- 1455US5285074ADynamic compensation of non-linear electron beam landing angle in variable axis lensesIBM·Filed 1992·Granted Feb 8, 1994·14 cites·17 claims
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