Inventor
OSE HIROKI
JP8 patents
Patents
8 patentsUS6814811B2Nov 9, 2004
Semiconductor wafer and vapor phase growth apparatus
SHINETSU HANDOTAI KK279 citations97
US6475627B1Nov 5, 2002
Semiconductor wafer and vapor growth apparatus
SHINETSU HANDOTAI KK23 citations91
US6454854B1Sep 24, 2002
Semiconductor wafer and production method therefor
SHINETSU HANDOTAI KK25 citations91
US5882401AMar 16, 1999
Method for manufacturing silicon single crystal substrate for use of epitaxial layer growth
SHINETSU HANDOTAI KK21 citations91
US6589336B1Jul 8, 2003
Production method for silicon epitaxial wafer and silicon epitaxial wafer
SHINETSU HANDOTAI KK23 citations89
US7270708B2Sep 18, 2007
Susceptor, vapor phase growth apparatus, epitaxial wafer manufacturing apparatus, epitaxial wafer manufacturing method, and epitaxial wafer
SHINETSU HANDOTAI KK8 citations71
US7060944B2Jun 13, 2006
Heat treatment device and heat treatment method
SHINETSU HANDOTAI KK5 citations61
US6746941B2Jun 8, 2004
Semiconductor wafer and production method therefor
SHINETSU HANDOTAI KK0 citations50