Inventor
LAUFFER PETER SEBALD
DE7 patents
Patents
7 patentsUS12584222B2Mar 24, 2026
Methods for thermal treatment of substrates
AIXTRON SE0 citations56
US12577670B2Mar 17, 2026
CVD reactor having means for locally influencing the susceptor temperature
AIXTRON SE0 citations56
US11713505B2Aug 1, 2023
Device and method for controlling the ceiling temperature of a CVD reactor
AIXTRON SE1 citations56
US12359319B2Jul 15, 2025
Arrangement for measuring the surface temperature of a susceptor in a CVD reactor
AIXTRON SE0 citations47
US11669072B2Jun 6, 2023
Device and method for obtaining information about layers deposited in a CVD method
AIXTRON SE0 citations46
US12305282B2May 20, 2025
Susceptor of a CVD reactor
AIXTRON SE0 citations44
US12435422B2Oct 7, 2025
Method for recording a state of a CVD reactor under production conditions
AIXTRON SE0 citations43