Inventor
BANSE Takanori
JP11 patents
Patents
11 patentsUS11145490B2Oct 12, 2021
Plasma processing method
TOKYO ELECTRON LTD2 citations71
US11404249B2Aug 2, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations67
US11721522B2Aug 8, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11367590B2Jun 21, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US12300467B2May 13, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US10825662B2Nov 3, 2020
Method for driving member and processing apparatus
TOKYO ELECTRON LTD1 citations56
US10546723B2Jan 28, 2020
Plasma processing method
TOKYO ELECTRON LTD0 citations50
US9818582B2Nov 14, 2017
Plasma processing method
TOKYO ELECTRON LTD1 citations48
US10770268B2Sep 8, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38
US10707088B2Jul 7, 2020
Method of processing target object
TOKYO ELECTRON LTD0 citations37
US10692726B2Jun 23, 2020
Method for processing workpiece
TOKYO ELECTRON LTD0 citations37