Inventor
SALINA MARCO
IT6 patents
Patents
6 patentsUS9753279B2Sep 5, 2017
Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
ST MICROELECTRONICS SRL2 citations71
US9332354B2May 3, 2016
Micromechanical detection structure for a MEMS acoustic transducer and corresponding manufacturing process
ST MICROELECTRONICS SRL5 citations70
US10746982B2Aug 18, 2020
Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
ST MICROELECTRONICS SRL1 citations61
US12068362B2Aug 20, 2024
Electrode structure having improved shape, and electronic device including the electrode structure
ST MICROELECTRONICS SRL0 citations60
US9921405B2Mar 20, 2018
Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
ST MICROELECTRONICS SRL0 citations50
US12464294B2Nov 4, 2025
Membrane microelectromechanical electroacoustic transducer
ST MICROELECTRONICS SRL0 citations48