P

Inventor

SHANKAR PREMCHANDRA M

US5 patents
⚠️ This page may combine multiple inventors who share the name “SHANKAR PREMCHANDRA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

3 patents
US11410292B2Aug 9, 2022

Equi-probability defect detection

KLA CORP2 citations67
US11127136B2Sep 21, 2021

System and method for defining flexible regions on a sample during inspection

KLA CORP0 citations50
US12266143B2Apr 1, 2025

Salient feature point based image alignment

KLA CORP0 citations48

KLA TENCOR CORP

2 patents
US10062156B2Aug 28, 2018

Method and system for detecting defects on a substrate

KLA TENCOR CORP3 citations65
US10957033B2Mar 23, 2021

Repeater defect detection

KLA TENCOR CORP2 citations63