Inventor

LATTARD LUDOVIC

NL6 patents

⚠️ This page may combine multiple inventors who share the name “LATTARD LUDOVIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US10987705B2Apr 27, 2021

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

ASML NETHERLANDS BV4 citations81

US10632509B2Apr 28, 2020

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

ASML NETHERLANDS BV4 citations81

US11738376B2Aug 29, 2023

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

ASML NETHERLANDS BV2 citations70

US12202019B2Jan 21, 2025

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

ASML NETHERLANDS BV0 citations60

MAPPER LITHOGRAPHY IP BV

1 patent

US9981293B2May 29, 2018

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

MAPPER LITHOGRAPHY IP BV9 citations81

QIMONDA AG

1 patent

US8018070B2Sep 13, 2011

Semiconductor device, method for manufacturing semiconductor devices and mask systems used in the manufacturing of semiconductor devices

QIMONDA AG4 citations56