Inventor
HEGDE SARPANGALA HARIHARAKESHAVA
US6 patents
Patents
6 patentsUS11227741B2Jan 18, 2022
Scanning ion beam etch
PLASMA THERM NES LLC4 citations69
US12176178B2Dec 24, 2024
Scanning ion beam deposition and etch
PLASMA THERM NES LLC0 citations59
US11646171B2May 9, 2023
Scanning ion beam etch
PLASMA THERM NES LLC0 citations59
US11901167B2Feb 13, 2024
Ion beam deposition target life enhancement
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US12368117B2Jul 22, 2025
Electrostatic discharge prevention in ion beam system
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US11784025B1Oct 10, 2023
Integral sweep in ion beam system
PLASMA THERM NES LLC0 citations50