Inventor
YUASA HIDEKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YUASA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12060641B2Aug 13, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations60
US12129544B2Oct 29, 2024
Cleaning method and plasma treatment device
TOKYO ELECTRON LTD0 citations50
US12077865B2Sep 3, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations50
US12567563B2Mar 3, 2026
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations48